진공 환경에 바로 사용 가능한 품목이 포함된 제품 시리즈

진공 환경에 바로 사용 가능한 품목이 포함된 제품 시리즈

PI는 일부 제품 시리즈에 대해 이미 고진공(HV) 또는 초고진공(UHV) 환경에서 바로 사용할 수 있는 특정 카탈로그 품목을 제공합니다.

또한 대부분의 PI 단축 및 다축 솔루션은 요청 시 진공용으로 개조할 수 있습니다. PI의 진공용 설계에 대한 자세한 내용은 >> 진공 기술 페이지에서 확인할 수 있습니다.

헥사포드

H-850.V Vacuum Compatible Hexapod

For loads to 80 kg
  • Vaccum Version
  • Range ±50/±50/±25mm
  • Rotation range ±15/±15/±30°

H-811.I2V Vacuum Compatible Miniature Hexapod

Compact and Highly Precise
  • Vacuum version
  • Range ±17/±16/±6.5mm
  • Rotation range ±10/±10/±21°
  • MiM 0.2/0.2/0.08µm
  • Load capacity 5kg

H-824.V Vacuum-Compatible Hexapod

Compact and Precise
  • Vacuum version
  • Range ±22.5/±22.5/±12.5mm
  • Rotation range ±7.5/±7.5/±12.5°
  • Load capacity 5kg

선형, 회전, 승강 스테이지 및 액세서리

RS-40 V7 Compact Rotation Stage Suitable for Vacuum

Precision Positioning

M-110 • M-111 • M-112 V6 Vacuum-Compatible Compact Linear Stage

XY(Z) Combinations with DC Gear Motor, Various Travel Range Variants

VT-80 V6 Linear Stage Suitable for Vacuum

Basic Version for Universal Fields of Use

L-611 V6 • V7 • V9 Precision Rotation Stage Suitable for Vacuum

High Run-Out Accuracy

L-509 V6 • V7 • V9 Vacuum-Compatible Precision Linear Stage

Compact Design, for Loads to 10 kg

L-310 V6 Precision Z Stage Suitable for Vacuum

Can be Compactly Combined with Linear and Rotation Stages
PI L-500

L-500 Adapter Bracket

For Vertical Mounting of Linear and Rotation Stages
Adapter Bracket
NEW

AB-65 Adapter Bracket

For Vertical Mounting of Linear and Rotation Stages

C-815.VF Vacuum Feedthroughs

Interfaces Between Air Side and High Vacuum (HV) or Ultrahigh Vacuum (UHV)
NEW

P-891.VA • P-892.VA Vacuum Feedthrough

Accessories for Vacuum-Compatible Piezo Positioners

L-220 V6 High-Resolution Linear Actuator Suitable for Vacuum

Suitable for High Cycle Numbers

피에조 액추에이터 및 스테이지

P-621.1U • P-625.1U PIHera Linear Precision Positioner

Vacuum Compatible and with Variable Travel Ranges and Axis Configuration

P-216 PICA Power Piezo Actuators

Preloaded Piezo Actuators (HVPZT) with Sensor Option
  • Travel range to 180µm
  • Push force to 4500N
  • Pull force to 500N
  • Subnanometer resolution
  • For vacuum/ high temperature

P-235 PICA Power Piezo Actuators

Preloaded High-Load Piezo Actuators (HVPZT) with Sensor Option
  • High Force
  • Travel range 180µm
  • Extremely high stiffness
  • Push force to 30000N
  • Pull force to 3500N

N-480 High-Precision Kinematic Mirror Mount

With N-470 PiezoMike Linear Actuators

N-470.V PiezoMike Linear Actuator

Minimum Dimensions, High Forces, Stable Positioning, Vacuum to 10-6 hPa

센서

D-050 • D-100 Capacitive Sensors

Subnanometer-Resolution Position Sensors
  • Highest precision
  • Resolution to 0.01nm
  • Linearity error to 0,01%
  • Measuring range to 300µm