에어 베어링 및 스테이지

에어 베어링 및 스테이지

에어 베어링 스테이지는 진동이 없는 모션이 필요하고 속도가 매우 일정해야 하며 최적의 각도 반복성이 요구되는 경우에 사용됩니다. 에어 베어링은 마찰, 마모, 백래시 효과를 방지합니다. PIglide 리니어, 로터리, 구형 베어링은 OEM, 산업 및 연구 시장의 응용 사례를 위해 통합 및 모터 구동화할 수 있는 정밀 부품입니다.  

에어 베어링 리니어 스테이지

NEW

A-143 PIglide Miniature Linear Air Bearing Stage

High Performance • Cleanroom-Compatible • Option for Vertical Mounting

A-142 PIglide Voice Coil Linear Stage with Air Bearings

High Performance • Cleanroom-Compatible • Option for Vertical Mounting
  • High performance
  • Possible vertical mounting
  • Motion platform 75mm × 80mm
  • Travel ranges up to 10mm
  • Acceleration up to 20 m/s

A-131 PIglide VC Voice Coil Linear Stage with Air Bearings

High-Performance Miniature Nanopositioning System
  • Miniature nanopositioning system
  • Clean room compatible
  • Travel ranges up to 25mm
  • Load capacity up to 30N
  • Acceleration up to 40m/s

A-110 PIglide LC Linear Stage with Air Bearings

Inexpensive High Performance Nanopositioning Stage
  • High precision positioning
  • Inexpensive & clean room compatible
  • Motion platform 160mm × 200mm
  • Travel ranges up to 400mm
  • Load capacity up to 100N

A-141 PIglide MB Miniature Linear Stage with Air Bearings

High Performance, Cleanroom Compatible, Customizable
  • High performance
  • Clean room compatible
  • Motion platform 57mm × 93mm
  • Travel ranges up to 35mm
  • Acceleration up to 3,5m/s

A-123 PIglide AT3 Linear Stage with Air Bearings

High Performance Nanopositioning Stage
  • High performance nanopositioning stage
  • Clean room compatible
  • Motion platform 210mm × 210mm
  • Travel ranges 50mm to 750mm
  • Resolution up to 1 nm

A-121 PIglide AT1 Linear Stage with Air Bearings

High Performance Small Footprint Nanopositioning Stage
  • High performance nanopositioning stage
  • small design
  • Motion platform 115mm × 115mm
  • Travel ranges up to 350mm
  • Resolution up to 1nm

에어 베어링 XY 스테이지

A-351 MGS Gantry System with Linear Motors

Robust Compact Design with Recirculating Ball Bearing Guides for High Load Capacity.

A-341 PIglide HGS Hybrid Gantry System

Hybrid Guide Design with Air Bearings and Recirculating Ball Bearing Guides for High Precision with Low Profile.

A-322 PIglide HS Planar Scanner with Air Bearing

XY Positioning System with 1 nm Resolution
  • XY air bearing stage, planar, high performance, travel to 1 m, linear motors, absolute encoder, nanometer precision. For high accuracy automation &amp
  • metrology.

A-311 PIglide IS Planar Scanner with Air Bearing

High-Performance, Compact XY Nanopositioning System
  • Compact XY-nanopositioning system
  • High-precision positioning
  • Low profile
  • Travel ranges up to 300mm × 400mm
  • Load capacity up to 147N

에어베어링 회전 및 팁/틸트 스테이지

A-523 PIglide High-Precision Z Tip/Tilt Stage with Air Bearings

High Performance • Cleanroom-Compatible • Low Profile
  • High performance
  • Low profile
  • Travel range in Z up to ±2.5 mm
  • Rotation range in θX, θY up to ±1°
  • Load capacity up to 8 kg

A-68x PIglide Rotation Stage with Air Bearing

Large Aperture, Friction Free, Motorized
  • Friction-free, motorized
  • ⌀365mm motion platform
  • ⌀260 mm aperture
  • Eccentricity/flatness &lt
  • 300nm

A-63x PIglide RL Flat Rotation Stage with Air Bearing

Friction-free, Motorized
  • Friction-free, motorized
  • Low profile
  • Eccentricity/flatness &lt
  • 100nm
  • Self-locking option

A-62x PIglide RM Rotation Stage with Air Bearings

Friction-Free, Ideal for Indexing, Positioning, Scanning, Measuring Technology
  • Friction-Free
  • Motion platform 50mm to 300mm
  • Load capacity up to 4170N
  • Eccentricity/flatness &lt
  • 200nm
  • mounted vertically or horizontally

PIglide 모션 컨트롤러

NEW

A-811.CE PIglide Motion Controller for One Axis

For Stages with Direct Drive, TCP/IP Interface
  • Motion controller for motor stages with air bearings. High end for industrial precision automation - linear and rotary motion.

A-82x PIglide Motion Controller for 4, 6 or 8 Axes

For Stages with Direct Drive and High Power Requirements, TCP/IP Interface
  • High power motion controller for linear motor stages with air bearings. High end for industrial precision automation - linear and rotary motion.

A-81x PIglide Motion Controller for 1, 2 or 4 Axes

For Stages with Direct Drive, TCP/IP Interface
  • Direct Drive, TCP/IP Interface
  • 1, 2, & 4 motion axes
  • Quiet PWM drives
  • Output 10A continuous/20A peak/axis

에어 베어링

A-41x PIglide FPC: Flat, Circular Air Bearing Modules

Friction-free, modular air bearings
PIglide RT Rotary Air Bearing Module

A-60x PIglide RT Rotary Air Bearing Module

Frictionless, Nonmotorized
  • Frictionless, non-motorized
  • Motion platform 50mm to 300mm
  • High load capacity up to 425kg
  • Eccentricity/flatness <200nm
  • mounted vertically or horizontally
PIglide RB Linear Air Bearing Module

A-10x PIglide RB Linear Air Bearing Module

Friction Free, Ideal for Positioning, Scanning, Metrology
  • High-resolution positioning
  • Friction-free & clean room compatible
  • Motion platform 300mm × 300mm
  • Load capacity 775kg
  • Travel ranges up to 1m

A-65x PIglide HB: Hemispherical Air Bearing Module

Friction-Free, Ideal for Rotational Motion on Three Axes
  • Ideal for Rotational Motion
  • Rotatable in three directions
  • Low inertia
  • Load capacity up to 635kg
  • tip/tilt range to ±45°

액세서리

Mounting Feet

A-10x.MNT Mounting Feet

For Mounting the Air Bearing Modules of the A-10x Series
PIglide Filter and Air Preparation Kits

A-80x PIglide Filter and Air Preparation Kits

Accessories for Air Bearings and Air Bearing Stages
  • Accessories
  • controls supply pressure
  • available with multiple channels
  • available with storage tank
  • available with vacuum generation

기술

PIglide Air Bearing Technology

PIglide Air Bearing Technology

Magnetic Direct Drives

Magnetic Direct Drives