Compact linear stage, versatile in use
Linear stage with compact size due to folded drive with belt drive. Clear aperture with 10 mm Ø. XY setups can be mounted directly without adapter plate.
Reduced outgassing especially for use in vacuum environments
Most notably, for the lubrication of the guides and the spindle a material with particularly low outgassing is used. This allows a bakeout temperature of up to 80° C. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6hPa.
Drive
Position measuring
Application fields
Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection.
| Motion | M-110.1VG1 | M-111.1VG1 | M-112.1VG1 | Tolerance |
|---|---|---|---|---|
| Active axes | X | X | X | |
| Travel range in X | 5 mm | 15 mm | 25 mm | |
| Maximum velocity in X, unloaded | 1 mm/s | 1.5 mm/s | 1.5 mm/s | |
| Positioning | M-110.1VG1 | M-111.1VG1 | M-112.1VG1 | Tolerance |
| Unidirectional repeatability in X | 0.25 µm | 0.25 µm | 0.25 µm | typ. |
| Bidirectional repeatability in X | ± 2 µm | ± 2 µm | ± 2 µm | typ. |
| Minimum incremental motion in X | 0.05 µm | 0.05 µm | 0.05 µm | typ. |
| Backlash in X | 3 µm | 3 µm | 3 µm | typ. |
| Reference switch | Hall effect | Hall effect | Hall effect | |
| Limit switches | Hall effect | Hall effect | Hall effect | |
| Motor encoder | Incremental rotary encoder | Incremental rotary encoder | Incremental rotary encoder | |
| Resolution, motor encoder | 2048 Cts./rev. | 2048 Cts./rev. | 2048 Cts./rev. | |
| Motor encoder: Sensor signal | A/B quadrature, RS-422 | A/B quadrature, RS-422 | A/B quadrature, RS-422 | |
| Drive Properties | M-110.1VG1 | M-111.1VG1 | M-112.1VG1 | Tolerance |
| Drive type | DC gear motor | DC gear motor | DC gear motor | |
| Nominal voltage | 12 V | 12 V | 12 V | |
| Nominal current, RMS | 0.16 A | 0.32 A | 0.32 A | typ. |
| Drive force in negative direction of motion in X | 10 N | 10 N | 10 N | typ. |
| Drive force in positive direction of motion in X | 10 N | 10 N | 10 N | typ. |
| Mechanical Properties | M-110.1VG1 | M-111.1VG1 | M-112.1VG1 | Tolerance |
| Guide | Ball guide | Ball guide | Ball guide | |
| Drive screw type | Fine-threaded spindle | Fine-threaded spindle | Fine-threaded spindle | |
| Drive screw pitch | 0.4 mm | 0.4 mm | 0.4 mm | |
| Gear ratio i | 256 : 9 | 256 : 9 | 256 : 9 | |
| Holding force in X, passive | 10 N | 10 N | 10 N | |
| Moved mass in X, unloaded | 11 g | 11 g | 11 g | |
| Permissible push force in Y | 15 N | 10 N | 10 N | max. |
| Permissible push force in Z | 30 N | 30 N | 20 N | max. |
| Permissible torque in θx | 0.15 N·m | 0.15 N·m | 0.15 N·m | max. |
| Permissible torque in θY | 0.15 N·m | 0.15 N·m | 0.15 N·m | max. |
| Permissible torque in θZ | 0.15 N·m | 0.15 N·m | 0.15 N·m | max. |
| Overall mass | 250 g | 270 g | 300 g | |
| Material | Anodized aluminum | Anodized aluminum | Anodized aluminum | |
| Miscellaneous | M-110.1VG1 | M-111.1VG1 | M-112.1VG1 | Tolerance |
| Connector | HD D-sub 26-pin (m) | HD D-sub 26-pin (m) | HD D-sub 26-pin (m) | |
| Vacuum class | 10⁻⁶ hPa | 10⁻⁶ hPa | 10⁻⁶ hPa | |
| Recommended controllers / drivers | C-863 C-884 G-901 G-910 ACS modular controller | C-863 C-884 G-901 G-910 ACS modular controller | C-863 C-884 G-901 G-910 ACS modular controller | |
| Cable length | 0.5 m | 0.5 m | 0.5 m | |
| Operating temperature range | -20 to 65 °C | -20 to 65 °C | -20 to 65 °C |
Note on minimum incremental motion: Values are achieved with the recommended controller
Note on nominal current: Values apply per phase
M-110.xxx1 / M-111.xxx1 / M-112.xxx1 Microtranslation Stage
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
Vacuum-compatible compact linear stage; DC gear motor; 5 mm travel range; 30 N load capacity; 1 mm/s maximum velocity; fine-threaded spindle; incremental rotary encoder, 2048 cts./rev. resolution, A/B quadrature, RS-422; vacuum compatible to 10-6 hPa; 0.5 m cable length
Vacuum-compatible compact linear stage; DC gear motor; 15 mm travel range; 30 N load capacity; 1.5 mm/s maximum velocity; fine-threaded spindle; incremental rotary encoder, 2048 cts./rev. resolution, A/B quadrature, RS-422; vacuum compatible to 10-6 hPa; 0.5 m cable length
Vacuum-compatible compact linear stage; DC gear motor; 25 mm travel range; 20 N load capacity; 1.5 mm/s maximum velocity; fine-threaded spindle; incremental rotary encoder, 2048 cts./rev. resolution, A/B quadrature, RS-422; vacuum compatible to 10-6 hPa; 0.5 m cable length
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Careful handling, adequate premises: PI does not only have the necessary equipment for the qualification of materials, components and final products, but also has many years of experience with regard to HV und UHV positioning systems.
Rotating electric motors such as DC or stepper motors are used in connection with screw or worm drives.
