P-612.Z Piezo Z Stage

Compact Nanopositioner with Aperture

P-612.Z Piezo Z Stage
제품 설명 사양 다운로드 견적 / 주문
  • Travel range 100 µm
  • Resolution to 0.2 nm
  • Linearity error 0.2 %
  • Compact: Surface 60 mm × 60 mm
  • Particularly inexpensive systems (mechanics and controller)
  • Zero-play, high-precision flexure guide system
  • Outstanding lifetime due to PICMA® piezo actuators

Application fields

  • Interferometry
  • Microscopy
  • Nanopositioning
  • Biotechnology
  • Test procedures and quality assurance
  • Semiconductor technology

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Specifications

Datasheet

Datasheet P-612.Z

버전 / 날짜
2018-05-08
버전 / 날짜
2018-05-08
버전 / 날짜
2018-06-14
버전 / 날짜
2018-07-12
문서 언어
pdf - 562 KB
pdf - 567 KB
pdf - 778 KB
pdf - 858 KB

Downloads

Datasheet

Datasheet

Datasheet P-612.Z

버전 / 날짜
2018-05-08
버전 / 날짜
2018-05-08
버전 / 날짜
2018-06-14
버전 / 날짜
2018-07-12
문서 언어
pdf - 562 KB
pdf - 567 KB
pdf - 778 KB
pdf - 858 KB

Documentation

Documentation

User Manual PZ280

P-612 XY Nanopositioning Systems and Vertical Nanopositioning Stages
버전 / 날짜
1.0.0 2017-04-27
버전 / 날짜
1.0.0 2017-04-27
문서 언어
Request download link
Documentation

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx
버전 / 날짜
6.1.0 10/2019
버전 / 날짜
6.1.0 10/2019
문서 언어
pdf - 1 MB
pdf - 1 MB

3-D Models

3-D Models

3-D-model P-612.xxL

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