|
Active axes
|
X ǀ Y
|
|
|
Travel range in X
|
100 µm
|
|
|
Travel range in Y
|
100 µm
|
|
|
Travel range in X, open loop, at -20 to 120 V
|
130 µm
|
+20 / -0 %
|
|
Travel range in Y, open loop, at -20 to +120 V
|
130 µm
|
+20 / -0 %
|
|
Linearity error
|
0.4 %
|
typ.
|
|
Angular error E_AY (pitch)
|
± 10 µrad
|
typ.
|
|
Angular error E_BX (pitch)
|
± 10 µrad
|
typ.
|
|
Angular error E_CX (yaw)
|
± 10 µrad
|
typ.
|
|
Angular error E_CY (yaw)
|
± 50 µrad
|
typ.
|
|
Positioning
|
P-612.2SL
|
Tolerance
|
|
Unidirectional repeatability in X
|
± 10 nm
|
typ.
|
|
Unidirectional repeatability in Y
|
± 10 nm
|
typ.
|
|
Resolution in X, open loop
|
0.8 nm
|
typ.
|
|
Resolution in Y, open loop
|
0.8 nm
|
typ.
|
|
Integrated sensor
|
SGS, indirect position measuring
|
|
|
System resolution in X
|
5 nm
|
|
|
System resolution in Y
|
5 nm
|
|
|
Drive Properties
|
P-612.2SL
|
Tolerance
|
|
Drive type
|
PICMA®
|
|
|
Electrical capacitance
|
1.5 µF
|
±20 %
|
|
Mechanical Properties
|
P-612.2SL
|
Tolerance
|
|
Stiffness in X
|
0.15 N/µm
|
±20 %
|
|
Stiffness in Y
|
0.15 N/µm
|
±20 %
|
|
Resonant frequency in X, unloaded
|
400 Hz
|
±20 %
|
|
Resonant frequency in X, under load with 100 g
|
200 Hz
|
±20 %
|
|
Resonant frequency in Y, unloaded
|
400 Hz
|
±20 %
|
|
Resonant frequency in Y, under load with 100 g
|
200 Hz
|
±20 %
|
|
Permissible push force in X
|
15 N
|
max.
|
|
Permissible push force in Y
|
15 N
|
max.
|
|
Permissible push force in Z
|
15 N
|
max.
|
|
Permissible pull force in X
|
5 N
|
max.
|
|
Permissible pull force in Y
|
5 N
|
max.
|
|
Guide
|
Flexure guide with lever amplification
|
|
|
Overall mass
|
150 g
|
±5 %
|
|
Material
| Aluminum, steel |
|
|
Miscellaneous
|
P-612.2SL
|
Tolerance
|
|
Operating temperature range
|
-20 to 80 °C
|
|
|
Connector
|
LEMO FFA.00.250.CTAC22
|
|
|
Sensor connector
|
LEMO FFA.0S.304.CLAC32
|
|
|
Cable length
|
1.5 m
|
±10 mm
|
|
Recommended controllers / drivers
| E-503, E-505, E-610, E-621, E-625, E-665 |
|
