- Noncontact distance measuring
- Absolute position sensing
- Vibration measuring
- Subnanometer resolution
- Flexible measuring range
- Easy integration
Highest accuracy and lifetime due to capacitive position sensors
In conjunction with the electronics for signal processing, a resolution can be reached in the subnanometer range for quasistatic applications. The bandwidth can be increased up to 10 kHz for high dynamics application, where a resolution in the 1 nm range can still be reached. The linearity error is under 0.1%.
Easy handling and integration
All PISeca sensor heads are equipped with a LEMO connector for easy mounting and replacement. The uniform shaft thickness ensures compatibility and flexibility. The cable for connecting to the evaluation electronics is available in several variants and must therefore be ordered separately.
Customized versions / two-electrode sensors
In addition to the standard sensors listed here, PI offers a series if application-specific custom versions where for example, the measuring range, geometry or material are adapted to customer requirements. Customized electronics are also available.
The two-electrode sensors in the D-100 series are available for the highest demands on linearity and resolution.
Fields of application
Industry and research. Semiconductor manufacturing and inspection. Nanometrology. Active vibration absorber. Precision machining.
User Manual D510T0001
D-510 PISeca Single-Electrode Capacitive Sensor Probe
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