S-325 Piezo Z/Tip/Tilt Platform

Active axes

Z, θ_X, θ_Y

Z, θ_X, θ_Y

Z, θ_X, θ_Y

Motion and positioning

Integrated sensor

–

SGS

SGS

Travel range in Z at 0 to 100 V, open loop

30

30

30

µm

+20 % / -0 %

Tip/tilt angle at 0 to 100 V, open loop

5

5

5

mrad

+20 % / -0 %

Travel range in Z, closed loop

–

30

30

µm

Tip / tilt angle in θ_X, θ_Y, closed loop

–

4

4

mrad

Resolution in Z, open loop

0.5

0.5

0.5

nm

typ.

Resolution in θ_X, θ_Y, open loop

0.05

0.05

0.05

µrad

typ.

Resolution in Z, closed loop

–

0.6

0.6

nm

typ.

Closed-loop resolution in θ_X, θ_Y

–

0.1

0.1

µrad

typ.

Mechanical properties

Resonant frequency in Z, no load

2

2

2

kHz

±20 %

Resonant frequency, under load (with 25 mm × 8 mm glass mirror)

1

1

1

kHz

±20 %

Distance of pivot point to platform surface

6

6

6

mm

±0.5 mm

Platform moment of inertia

515

515

515

g × mm²

±20 %

Drive properties

Ceramic type

PICMA® P-885

PICMA® P-885

PICMA® P-885

Electrical capacitance

3 × 3.1

3 × 3.1

3 × 3.1

µF

±20 %

Miscellaneous

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

°C

Housing material

Aluminum

Aluminum

Aluminum

Mass

0.065

0.065

0.065

kg

±5 %

Cable length

2

2

2

m

+100 mm / -0 mm

Sensor / voltage connection

LEMO

LEMO

D-sub 25 (m)

Recommended electronics

E-610, E-616, E-663, E-727

E-610, E-616, E-663, E-727

E-610, E-616, E-663, E-727