P-541.Z • P-541.T Piezo Z Stages / Z and Tip/Tilt Stages

P-541.Z • P-541.T Piezo Z Stages / Z and Tip/Tilt Stages
Product Description Specifications Downloads Quote / Order
  • Low profile for easy integration: 16.5 mm
  • Clear aperture 80 mm × 80 mm
  • Travel range to 150 µm
  • Tip/tilt angle to 1.2 mrad
  • Parallel kinematics for faster response times and higher multi-axis accuracy
  • Sensor technology: Inexpensive strain gauge sensors or capacitive sensors for higher performance
  • Outstanding lifetime due to PICMA® piezo actuators
  • Combination with microscope stages possible for long travel ranges

Fields of application

  • Scanning microscopy
  • Super-resolution microscopy
  • Biotechnology
  • Mask/wafer positioning
  • Sample positioning
  • Interferometry
  • Metrology

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

High dynamics multi-axis operation due to parallel kinematics

In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical design of all axes allow fast, dynamic, and nevertheless precision motion.

Specifications

Datasheet P-541.Z - P-541.T

Version / Date
2018-05-08
Version / Date
2018-05-08
Version / Date
2018-06-06
Version / Date
2018-07-10
Document language
pdf - 600 KB
pdf - 607 KB
pdf - 701 KB
pdf - 784 KB

Downloads

Datasheet

Datasheet P-541.Z - P-541.T

Version / Date
2018-05-08
Version / Date
2018-05-08
Version / Date
2018-06-06
Version / Date
2018-07-10
Document language
pdf - 600 KB
pdf - 607 KB
pdf - 701 KB
pdf - 784 KB

Documentation

Short Instructions PZ240EKDK

P-5xx, P-6xx, P-7xx Piezo Positionings Systems
Version / Date
4.0.0 2017-02-06
pdf - 635 KB

3-D Models

P-541.Z 3-D model

Quote / Order

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