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N-865 NEXACT® SpaceFAB

6 Degrees of Freedom, Highest Precision, Flat Design

N-865 NEXACT® SpaceFAB
Product Description Specifications Downloads Quote / Order
  • Six Degrees of Freedom
  • Clear aperture
  • Sensor resolution 0.5 nm
  • 15 N load capacity
  • Self-locking when switched off: Saves energy and reduces generation of heat

PiezoWalk® technology: High resolution and low wear

The PiezoWalk® technology combines the technological advantages of piezo actuators with those of piezomotors. PiezoWalk® stepping drives offer not only subnanometer resolution, high forces, and high stiffness but, based on their drive principle, allow theoretically unlimited travel ranges. In contrast to other piezo-motorized drive principles, PiezoWalk® stepping drives are not subject to sliding friction effects. They are based on stiction contacts of several piezo actuators that step along a runner. For feed forward, the actuators are lifted physically from the runner, which causes hardly any wear and abrasion. Preloading the actuators against the runner ensures self-locking of the stepping drive. Therefore, the stepping drive holds the position at rest and mechanically stable when switched off (no servo jitter). Due to the self-locking at rest, no energy is consumed and no heat is generated.

Direct position measuring with PIOne linear encoder

The high-resolution PIOne encoder was developed by PI and, with corresponding processing of the measured value, allows a position resolution of much less than one nanometer. The optical and noncontact PIOne encoders are based on an interferometric measuring principle. They measure the actual position directly at the motion platform with the highest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. Due to the short signal period of 0.5 µm and the high quality of the signals, the linearity error of PIOne encoders is less than 1 %. PIOne encoders support direction sensing when evaluating a reference signal.

Crossed roller bearings

With crossed roller bearings, the point contact of the balls in ball bearings is replaced by a line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller bearings are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent linear guide creeping.

Valid patents

In the technological field of piezo stepping drives (NEXACT®, NEXLINE®), PI has the following patents and patent applications:

DE10148267B4, EP1267478B1, EP2209202B1, EP2209203B1, US6800984B2

Fields of application

Sample manipulation, sample positioning, optics or mechanical components with high precision and stability, precision mechanics in the semiconductor industry, micromanipulation, microscopy, automation, applications in confined spaces, applications in a vacuum or nonmagnetic environments.

Specifications

Datasheet N-865

Version / Date
2017-05-03
Version / Date
2017-05-03
Version / Date
2017-08-08
Document language
pdf - 701 KB
pdf - 585 KB
pdf - 598 KB

Downloads

Datasheet

Datasheet N-865

Version / Date
2017-05-03
Version / Date
2017-05-03
Version / Date
2017-08-08
Document language
pdf - 701 KB
pdf - 585 KB
pdf - 598 KB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly

N-865.160 NEW!
SpaceFAB, NEXACT® Piezo Walking Drive, ±6.5 mm Travel Range in X and Y, ±5 mm Travel Range in Z, ±7° Rotation Range in θx and θy, θz, ±8° Rotation Range in θz, 15 N Load Capacity in Z

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