H-824 6-Axis Hexapod

H-824 6-Axis Hexapod
Product Description Specifications Downloads Quote / Order
  • Load capacity to 10 kg, self-locking version
  • Travel ranges to 45 mm / 25°
  • Min. incremental motion to 0.3 µm
  • Repeatability to ±0.1 µm / ±2 µrad
  • Velocity to 25 mm/s
  • Vacuum-compatible versions available

Precision-class 6-axis positioning system

Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction. Vacuum-compatible versions to 10-6 hPa are available

Compact due to folded drive design

Fields of application

Research and industry, standard and vacuum environments. For micromanipulation, biotechnology, semiconductor manufacturing

Specifications

Datasheet H-824

Version / Date
2018-05-17
Version / Date
2018-05-16
Version / Date
2018-07-12
Document language
pdf - 677 KB
pdf - 687 KB
pdf - 754 KB

Downloads

Datasheet

Datasheet H-824

Version / Date
2018-05-17
Version / Date
2018-05-16
Version / Date
2018-07-12
Document language
pdf - 677 KB
pdf - 687 KB
pdf - 754 KB

Documentation

Short Instructions MS247EK

Hexapod Systems: H-xxx Hexapod with C-887.5xx Controller
Version / Date
1.0.0 March 2018
pdf - 3 MB

User Manual MS200

H-824 Compact Microrobot
Version / Date
2.0.0 2017-07-24
Version / Date
2.0.0 2017-07-24
Document language
pdf - 1 MB
pdf - 1 MB

3-D Models

H-824 STEP

Version / Date
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Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly

H-824.G2V
Compact hexapod microrobot, gearhead, 0.5 mm/s, 5 kg load, vacuum compatible to 10-6 hPa, Sub-D connector, 2 m vacuum-side cable, feedthrough, 3 m air-side cable
H-824.D2V
Compact hexapod microrobot, direct drive, 12.5 mm/s, 2.5 kg load, vacuum compatible to 10-6 hPa, Sub-D connector, 2 m vacuum-side cable, feedthrough, 3 m air-side cable