P-620.2 – P-629.2 PIHera XY Piezo Stage

High-precision XY Nanopositioners with Variable Travel Ranges

  • Travel ranges 50 to 1800 µm
  • Resolution to 0.1 nm
  • Positioning accuracy 0.02 %
  • Direct position measuring with capacitive sensors
  • X, XY, Z, XYZ versions
P-620.2 – P-629.2 PIHera XY Piezo Stage
제품 설명 사양 다운로드 견적 / 주문

Application fields

  • Interferometry
  • Microscopy
  • Nanopositioning
  • Biotechnology
  • Test procedures and quality assurance
  • Photonics
  • Fiber positioning
  • Semiconductor technology

Outstanding lifetime due to PICMA® piezo actuators

The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They work in a wide temperature range.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimal repeatability, outstanding stability, and stiff, fast-responding control.

Specifications

Datasheet

Datasheet P-620.2 – P-629.2

버전 / 날짜
2023-12-12
pdf - 731 KB
버전 / 날짜
2023-12-12
pdf - 769 KB
버전 / 날짜
2018-05-17
pdf - 773 KB
버전 / 날짜
2018-07-03
pdf - 859 KB

Downloads

Product Note

Product Note

Product Change Notification Piezo Actuator Driven Products

버전 / 날짜
2021-04-19
pdf - 377 KB
영어

Datasheet

Datasheet

Datasheet P-620.2 – P-629.2

버전 / 날짜
2023-12-12
pdf - 731 KB
버전 / 날짜
2023-12-12
pdf - 769 KB
버전 / 날짜
2018-05-17
pdf - 773 KB
버전 / 날짜
2018-07-03
pdf - 859 KB

Documentation

Documentation

Short Instructions PZ240

Piezo Positioning Systems: P-5xx / P-6xx / P-7xx

버전 / 날짜
6.2.0 03/2024
pdf - 561 KB
버전 / 날짜
6.2.0 03/2024
pdf - 595 KB
Documentation

User Manual PZ234

P-620, P-621, P-622, P-625, P-628, P-629 PIHera Piezo Stages with Capacitive Sensors

버전 / 날짜
1.3.0 2021-11-03
pdf - 3 MB
버전 / 날짜
1.3.0 2021-11-03
pdf - 3 MB

3-D Models

3-D Models

P-62x.2 STEP

zip - 1,011 KB

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