Linear Piezo Flexure Stages

PI’s  nanopositioning stages and scanners combine nanometer-precision resolution and guiding precision with minimum crosstalk. This makes them particularly suitable for reference applications in metrology, for microscopic processes, for interferometry or in inspection systems for semiconductor chip production.

Linear piezo stages with PICMA® piezo actuator drive and flexure guidings are available for travel ranges up to 1.5 mm.

Piezo Flexure Linear Stages

P-621.1U • P-625.1U PIHera Linear Precision Positioner

Vacuum Compatible and with Variable Travel Ranges and Axis Configuration

P-620.Z - P-622.Z PIHera Vertical Precision Positioner

Variable Travel Ranges and Axis Configuration

P-630 High Dynamics Piezo Nanopositioning System

1 Axis with Large Aperture

S-303 Piezo Phase Shifters

High Dynamics, Nanometer-Precision Piezo Phase Shifters

P-753 LISA Linear Actuator and Stage

Dynamic and Stable in Position

P-752 High-Precision Nanopositioning Stage

Highly Dynamic and Stable Piezo Scanner with Extremely Accurate Guiding
PI P-750

P-750 Piezo Nanopositioning System

High-Load Piezo-Driven Nanopositioning Systems with Direct Metrology

P-733.Z High Dynamics Z Nanopositioner / Scanner

Direct Position Measuring and Clear Aperture

P-612.Z Piezo Z Stage

Compact Nanopositioner with Aperture

P-611.1 Linear Piezo Positioning System

Inexpensive, Compact Linear Positioning System

P-620.1 • P-629.1 PIHera Linear Precision Positioner

Variable Travel Ranges and Axis Configuration