LMS-270 Precision Linear Stage

LMS-270 Precision Linear Stage
Product Description Specifications Downloads Quote / Order
  • Travel ranges to 1000 mm
  • Velocity to 800 mm/s
  • Incremental encoder with 15 nm resolution
  • 480 N peak force

Reference-class linear stage

High travel accuracy. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp).

Multi-axis combinations with the directly driven rotation stages of the UPR series.

Versions with DC servo motors or stepper motors are available with the same footprint.

Magnetic direct drive

Ironless magnetic direct drive for high velocity and acceleration. High position resolution.

Application fields

Industry and research. Metrology, precision scanning in in semiconductor or electronics manufacturing.

Specifications

Datasheet LMS-270

Version / Date
2017-07-05
Version / Date
2017-07-05
Version / Date
2017-08-21
Document language
pdf - 512 KB
pdf - 498 KB
pdf - 606 KB

Downloads

Datasheet

Datasheet LMS-270

Version / Date
2017-07-05
Version / Date
2017-07-05
Version / Date
2017-08-21
Document language
pdf - 512 KB
pdf - 498 KB
pdf - 606 KB

Quote / Order

Ask for a free quote on quantities required, prices, and lead times or describe your desired modification. All products available online can be ordered directly

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