LMS-180 Precision Linear Stage

High Dynamics due to Magnetic Direct Drive, Excellent Travel Accuracy

LMS-180 Precision Linear Stage
다운로드 가기 사양 다운로드 견적 / 주문
  • Travel ranges to 508 mm (20")
  • Velocity to 500 mm/s
  • Incremental encoder with 15 nm resolution

Reference-class linear stage

High travel accuracy with recirculating ball bearings. Inductive limit switches. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp).

Multi-axis combinations with the directly driven rotation stages of the UPR series.

Versions with DC servo or stepper motors are available with the same footprint.

 

Magnetic direct drive

Ironless magnetic direct drive for high velocity and acceleration. High position resolution.

Fields of application

Industry and research. Metrology, precision scanning in semiconductor or electronics manufacturing.

Specifications

Datasheet LMS-180

버전 / 날짜
2017-04-19
버전 / 날짜
2017-04-19
버전 / 날짜
2017-08-08
문서 언어
pdf - 656 KB
pdf - 660 KB
pdf - 737 KB

Downloads

Datasheet

Datasheet LMS-180

버전 / 날짜
2017-04-19
버전 / 날짜
2017-04-19
버전 / 날짜
2017-08-08
문서 언어
pdf - 656 KB
pdf - 660 KB
pdf - 737 KB

Documentation

User Manual LMS-180

Precision Linear Stage
버전 / 날짜
MAN_LMS-180_9_EN_01.PDF
버전 / 날짜
2017-04-21
문서 언어
pdf - 925 KB
pdf - 930 KB

3-D Models

LMS-180 3-D model

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