P-915KVPZ Vacuum-Compatible Z Piezo Stage

P-915KVPZ Vacuum-Compatible Z Piezo Stage
Product Description Specifications Downloads
  • Travel range 45 µm
  • Large clear aperture 273 mm × 273 mm
  • Direct metrology with capacitive sensors
  • Direct drive for high dynamics and stiffness
  • Vacuum-compatible to 10-6 hPa
  • Outstanding lifetime due to PICMA® piezo actuators

Specifications

Datasheet P-915KVPZ

Version / Date
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Version / Date
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Document language
pdf - 640 KB
pdf - 640 KB

Downloads

Datasheet

Datasheet P-915KVPZ

Version / Date
---
Version / Date
---
Document language
pdf - 640 KB
pdf - 640 KB