N-331 PICMAWalk Walking Drive

N-331 PICMAWalk Walking Drive
Product Description Specifications Downloads Quote / Order
  • Robust and industrially usable walking drive with PICMA® technology for extreme durability
  • Fastest and strongest drive of its size class
  • Variable runner lengths from 25 mm to 100 mm
  • Precise, nanometer precision positioning of loads up to 5 kg
  • Plug-and-play, thanks to PI proprietary controller technology

Fields of application

  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology
  • Motion in strong magnetic fields and in a vacuum

Outstanding lifetime thanks to PICMA® piezo actuators

The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

Nanometer precision and high feed force with PiezoWalk® walking drives

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Suitable for sophisticated vacuum applications

Piezo motors from PI are principally vacuum-compatible and suitable for operation in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

Specifications

Datasheet N-331

Version / Date
2018-04-17
Version / Date
2018-04-17
Version / Date
2018-06-19
Document language
pdf - 698 KB
pdf - 706 KB
pdf - 797 KB

Downloads

Datasheet

Datasheet N-331

Version / Date
2018-04-17
Version / Date
2018-04-17
Version / Date
2018-06-19
Document language
pdf - 698 KB
pdf - 706 KB
pdf - 797 KB

Documentation

User Manual PZ271

N-331 Piezoelectric Walking Drive PICMAWalk
Version / Date
2017-03-22
Document language English
pdf - 564 KB

3-D Models

N-331 STEP

N-331 STEP

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