N-216 NEXLINE® Linear Actuator

Nanopositioning Over Long Travel Ranges, With High Forces, PiezoWalk® Principle

N-216 NEXLINE® Linear Actuator
다운로드 가기 사양 다운로드 견적 / 주문

Fields of application

  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology
  • Motion in strong magnetic fields and in a vacuum

Nanometer precision and high feed force with PiezoWalk® walking drives

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Suitable for sophisticated vacuum applications

Piezo motors from PI are principally vacuum-compatible and suitable for operation in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

Specifications

Datasheet N-216

버전 / 날짜
2018-07-17
버전 / 날짜
2018-07-17
버전 / 날짜
2018-07-17
문서 언어
pdf - 713 KB
pdf - 722 KB
pdf - 790 KB

Downloads

Datasheet

Datasheet N-216

버전 / 날짜
2018-07-17
버전 / 날짜
2018-07-17
버전 / 날짜
2018-07-17
문서 언어
pdf - 713 KB
pdf - 722 KB
pdf - 790 KB

Documentation

User Manual N216T0013

N-216.101, .1A1, .201, .2A1 NEXLINE® Piezo Stepping High-Load Actuators
버전 / 날짜
2017-07-20
문서 언어 English
pdf - 1 MB

3-D Models

N-216 3-D model

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