N-216 NEXLINE® Linear Actuator

Nanopositioning Over Long Travel Ranges, With High Forces, PiezoWalk® Principle

  • Force generation to 600 N
  • Holding force to 800 N
  • Travel range 20 mm
  • Integrated direct-measuring linear encoder with resolution 5 nm
N-216 NEXLINE® Linear Actuator
제품 설명 사양 다운로드 견적 / 주문

Application fields

  • Industrial precision positioning
  • Semiconductor technology
  • Semiconductor tests
  • Wafer inspection
  • Lithography
  • Nanoimprinting
  • Nanometrology
  • Motion in strong magnetic fields and in a vacuum

Nanometer precision and high feed force with PiezoWalk® walking drives

Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads to forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental linear encoder

Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Suitable for sophisticated vacuum applications

Piezo motors from PI can be designed for use in a vacuum and are suitable for operating in strong magnetic fields. Special versions of the drives are available for this purpose. Piezo walking drives can also be used in cleanrooms or in environments with strong ultraviolet radiation.

Specifications

Datasheet

Datasheet N-216

버전 / 날짜
2019-01-21
pdf - 625 KB
버전 / 날짜
2019-01-21
pdf - 596 KB
버전 / 날짜
2019-01-22
pdf - 788 KB

Downloads

Datasheet

Datasheet

Datasheet N-216

버전 / 날짜
2019-01-21
pdf - 625 KB
버전 / 날짜
2019-01-21
pdf - 596 KB
버전 / 날짜
2019-01-22
pdf - 788 KB

Documentation

Documentation

User Manual MP120

N-216 NEXLINE® Linear Actuator

버전 / 날짜
1.0.0 2019-10-16
pdf - 2 MB
버전 / 날짜
1.0.0 2019-10-16
pdf - 2 MB

3-D Models

3-D Models

N-216 3-D model

zip - 225 KB

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