- Products - PI (Physik Instrumente) L.P.

Planar, Parallel Motion Basis for New 6-Axis Positioning Systems

Industries such as micro-assembly, semiconductor testing, and automated photonics packaging require multi-axis motion with nanometer precision and dependability.

Worldwide nanopositioning equipment leader PI (Physik Instrumente) has engineered and released two new compact multi-axis positioning stages based on low-profile parallel-kinematic motion devices. Driven by piezo ceramic motors, nanometer precision is achieved along with high stability based on low heat generation and a drift free auto-position-clamping feature.

N-865 High End – Low Profile 6-Axis Motion Platform, 2 Nanometer Minimum Incremental Motion
This high-end system is based on proprietary PiezoWalk® linear motor technology. It provides 2 nanometer minimum incremental motion in X, Y, Z with 0.2 microradian angular motion in Pitch, YAW, and Roll. The N-865 can support loads up to 15N. Integrated proprietary linear encoders measure the position with 0.5 nanometers resolution.

Q-845 Compact 6-Axis Motion Platform, 6 Nanometer Minimum Incremental Motion  
The Q-845 is high performance, compact 6-axis system based on piezo inertia drives, providing minimum incremental motion as small as 6 nanometers. Integrated linear encoders measure the position with 1 nanometer resolution and provide feedback to the 6-axis controller. The Q-845 supports loads to 10 N and achieves velocities up to 5mm/sec.

Virtual, Programmable Pivot Point
Both 6-axis systems provide software programmable virtual pivot points – a decisive feature for alignment processes such as required in SiP and micro-optics applications. 




Planar, Parallel Motion Basis for New 6-Axis Positioning Systems

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N-865 / Q-845 high res image

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